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Semiconductor quartz wafer doon
Faahfaahin Gaar ah:
1. Magacyo kale: Taangiga quartz ee Semiconductor, qubayska qubayska ee semiconductor, taangiga quartz ee semiconductor.
2. Codsiga: Doonta wafer ee Semiconductor Quartz ee hababka heerkulka sare sida faafinta, oksaydhka, CVD, annealing, iwm, ee wax soo saarka semiconductor.
3. Halbeegyada asaasiga ah:
Quartz nadiif ah oo aadka u sarreeya (> 99.99% SiO₂): waxay ka fogaataa wasakhaynta ion birta (Na +, K +, Fe³+, iwm.) waxayna buuxisaa shuruudaha nadaafadda ee hababka horumarsan (<5nm nodes).
Iska caabin heerkul sarreeya: heerkulka shaqada oo joogto ah 1200 ℃, iska caabin heerkul degdeg ah 1300 ℃.
Kiimiko ahaan aan firfircoonayn: U adkaysta gaasaska sida HCl, H₂, O₂, SiH₄ iyo deegaan acid/alkaline. Aan qudhun lahayn ee isticmaalka muddada dheer.
Description
Semixlab Semiconductor Quartz doonyaha wafer waa aalado muhiim ah oo loogu talagalay hababka heerkulka sare sida faafinta, oksaydhka, CVD, annealing, iwm, ee wax soo saarka semiconductor. Ka samaysan daahirnimo sare ee quartz synthetic oo leh iska caabin heerkul sare oo heersare ah, xasilooni kiimikaad iyo isku xidhka balaadhinta kulaylka hooseeya, waxay si adag u qaadi kartaa maraqyada deegaanka habraaca adag si loo hubiyo joogteynta habka iyo waxsoosaarka badeecada.
Qalabka lagu dabaqi karo: La jaanqaadi kara dhammaan noocyada kala duwan ee Foornada Tooska ah ee Tooska ah (Horizontal/Vertical Diffusion Furnace), nidaamka LPCVD iyo qalabka daaweynta kulaylka degdega ah (RTP).
Hubinta Tayada
Xakamaynta tayada adag: 100% helium mass spectrometry ogaanshaha daadinta (heerka daadinta <1×10⁻ mbar·L/s). Warbixinta nadiifnimada alaabta (ICP-MS) ayaa loo soo saaray qayb kasta.
Heerarka shahaadooyinka: Iyadoo la raacayo tilmaamaha SEMI F47, iyada oo loo marayo ISO 9001: 2015 shahaadada nidaamka maaraynta tayada.
Nolosha adeegga: celceliska nolosha ee xaaladaha caadiga ah waa in ka badan 2 sano (waxay kuxirantahay inta jeer ee habka iyo xaaladaha heerkulka).
Waa maxay sababta aan u dooranay doonteena quartz?
Adeegyada gaarka ah: Cabbirka iyo dhismaha la habeeyey iyadoo loo eegayo qaabka qalabka (TEL, Kokusai, ASM, iwm.) iyo shuruudaha nidaamka.
Jawaab degdeg ah: Waqtiga dhalmada caadiga ah waa 3 toddobaad, dalabaadka degdegga ah waxaa lagu dhimi karaa 10 maalmood oo shaqo.
Shabakadda adeegga caalamiga ah: Bixi talo farsamo, hagitaan rakibaadda iyo taageerada dayactirka iibka ka dib. Tilmaamaha Qalabka.
sooc
Faahfaahinta mashruuca
Abuuritaanka walxaha Quartz Fused
Daahirnimada ≥99.99% SiO₂
Waafaqsanaanta cabbirka wafer 8 ", 12" (waxaa lagu beddeli karaa 6" ama 18")
Heerkulka shaqaynaya ≤1200°C (sii socota) / 1300°C (ugu sarreeya)
Isku-dhafka balaadhinta kulaylka (CTE) 0.55×10⁻⁶/°C (20-1000°C)
Qalafsanaanta dusha sare (Ra) ≤0.2μm
Awoodda caadiga ah 25/50/100 kiniin
Gaasaska nidaamka lagu dabaqi karo O₂, N₂, H₂, Ar, SiH₄, HCl, iwm
| Hantida makaanikada | Cufnaanta (g/cm3) | 2.2 |
| Mohs adag tahay | 6-7 | |
| Awood cadaadis (MPa) | 1100 | |
| Xoog xajin (N/mm2) | 50 | |
| Xoog dabacsanaanta (N/mm2) | 65 | |
| Awoodda torsional (N/mm2) | 30 | |
| Hababka dhalinyarada (MPa) | 7.2x104 | |
| Saamiga Poisson | 0.16 | |
| Guryaha kuleylka leh | Isku-dhafka balaarinta kulaylka (20 ~ 320 ℃, k-1) | 5.5x10-7 |
| Dhaqdhaqaaqa kulaylka (20 ℃, W·m-1k-1) | 1.4 | |
| Kuleyl gaar ah (20 ℃, J·kg-1k-1) | 670 | |
| Bar jilicsan (℃) | 1700 | |
| Barta soo jiidashada (℃) | 1180 | |
| Dhibicda cadaadiska (℃) | 1080 | |
| Hanti koronto | Iska caabin koronto (Ω·m) | 1x1016(20 ℃) |
| Dielectric joogto ah (10GHz) | 3.74 | |
| Khasaaraha korontada (10GHz) | 0.0002 | |
| Awoodda korontada (V·m-1) | 3.7x107 |
Codsiyada
oksaydhaynta/fidinta heerkulka sare: doping silicon (phosphorus, boron diffusion), koritaanka gate oxide.
Dhigista filimka khafiifka ah: Dhigista LPCVD polycrystalline silicon, Silicon nitride (Si₃N₄).
Habka soo jiidashada: annealing ka dib ion implantation (RTA), biraha alloying.
Semiconductor jiilka saddexaad: Silicon carbide (SiC), gallium nitride (GaN) habka epitaxy.
Advantage tartanka
1. Astaamaha alaabta
Quartz nadiif ah oo aadka u sarreeya (> 99.99% SiO₂): waxay ka fogaataa wasakhaynta birta ions (Na +, K +, Fe³ +, iwm) oo buuxisa shuruudaha nadaafadda ee hababka horumarsan (<5nm nodes).
Iska caabin heerkul sare ah: heerkulka shaqaynta joogtada ah ee 1200C, iska caabin heerkul degdeg ah oo ah 1300C, ma laha qallafsanaan ama khatar crystallization.
Dhaqdhaqaaq la'aanta kiimikada: U adkeyso gaaska habka loo maro sida HCl, H₂, O₂, SiH₄ iyo deegaan acid/alkaline. Aan qudhun lahayn isticmaalka muddada dheer.
2. Naqshad sax ah
Wanaaji qaabka:
Saxnaanta fogaanta boosku waa ± 0.05mm, iyada oo hubinaysa meelaynta waferka saxda ah (8/12 inch) iyo ka hortagga xagashada ama barokaca.
Naqshad u adkaysata shoogga kulaylka, la qabsiga kor u kaca iyo dhicista degdega ah (heerka kulaylka ≤20°C/daqiiqo).
Samaynta walxaha hoose: Dusha sare waa mid aad u saxan (Ra ≤0.2μm) si loo yareeyo ku-xidhnaanta walxaha oo ay u dhacdo.
3. Qaabaynta kala duwan
Awoodda Ikhtiyaarka: Taageerada 25 xabbo, 50 xabbo, 100 xabbo iyo tilmaamo kale oo heer ah, sidoo kale waa la habeyn karaa lambarka booska aan caadiga ahayn.
Nooca la qabsiga: Doon furan, Doon xidhan ama nooca doonta gaarka ah (sida nashqada kanaalka leexinta ee hoose).
FAQ
Q1: Miyaad bixin kartaa cabbir aan caadi ahayn ama naqshad gaar ah?
A1: Semixlab waxay taageertaa adeegyada gaarka ah, oo ay ku jiraan hagaajinta cabbirka, xadka sare ee heerkulka (kor u qaadida agabka ayaa loo baahan yahay) ama nooca interface. Fadlan la xidhiidh kooxda farsamada ee Semixlab si aad u hesho shuruudo gaar ah.
Q2: Intee ayay le'eg tahay wakhtiga hogaanka?
A2: Waqtiga gaarsiinta alaabada caadiga ah waa toddobaadyada 4-6, iyo waqtiga naqshadeynta iyo xaqiijinta alaabada caadiga ah waa 2-3 toddobaad.
Q3: Ma bixisaa taageero farsamo ka dib iibka?
J3: Haa, waxaanu bixinaa la-talin farsamo oo cimri-dherer ah iyo adeegyada gurmadka degdegga ah. Haddii ay dhacdo dhibaato rakibidda ama isticmaalka, kooxda taageerada waxaa lagula xiriiri karaa iimaylka ama taleefanka wakhti kasta.
Q4: Alaabta miyuu la kulmaa heerarka warshadaha semiconductor?
A4: Haa, habka wax soo saarku wuxuu u hoggaansamaa heerarka SEMI waxaana shahaado ka helay nidaamka maaraynta tayada ISO 9001. Dufcad kasta waxaa lagu tijaabiyaa cidhiidhiga hawada, caabbinta heerkulka iyo nadiifnimada ka hor inta aan laga tagin warshadda.
