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SiC Kuleyliyaha garaafka dahaarka leh ee MOCVD
Semixlab SiC Dahaarka Graphite MOCVD Heater waa sidaha kuleylka leh ee waxqabadka sare loogu talagalay hababka wax soo saarka semiconductor ee adeegsada kaydinta uumiga kiimikada (CVD) si ay u sameeyaan lebbis, silikoon carbide cufan (SiC) oo daahan dusha sare ee substrate graphite daahirnimo aadka u-sare ah.
Description
Details Products
Kuleyliyaha SiC Coated Graphite MOCVD wuxuu isku daraa kuleylka heerkulbeegga heer sare ah ee garaafka heerkulka sare iyo iska caabbinta daxalka ee dahaarka SiC, waxaana si weyn loogu adeegsadaa qalabka uumiga kiimikada ee birta-organic (MOCVD) si loo hubiyo xasilloonida iyo nadiifnimada sare ee hababka koritaanka epitaxy wafer.
SiC Dahaarka Garaafka MOCVD Astaamaha Alaabta Kuleyliyaha
1. Nadiifinta aadka u sareysa iyo xasiloonida kiimikada
Nadiifinta ≥99.99995%: Kuleyliyaha Graphite-ka waxaa lagu diyaariyey koloriin heerkul sare ah iyada oo loo marayo habka CVD, kaas oo si wax ku ool ah uga fogaanaya wasakhaynta birta oo buuxisa baahida deegaan aad u nadiif ah oo soo saara semiconductor.
Daxalka Ka-hortagga Kiimikada: Cufan iyo adkaanta sare ee daahan SiC (adkeysiga Vickers ee 2500-2800) waxay u adkeysan kartaa nabaad-guurka asiidhka, alkalis, cusbada iyo dareerayaasha organic, taas oo sii dheeraysa nolosha adeegga qalabka ee deegaanka gaaska daxalka ah.
2. Iska caabin heerkul sare oo heer sare ah
Deganaanshaha heerkulka sare: waxay u adkeysan kartaa ilaa 3000 ° C jawiga aan firfircoonayn, hawlgal xasiloon ilaa 2200 ° C deegaanka faakuumka, iyo 1600-1700 ° C ee deegaanka oxidizing, kaas oo ku habboon xaaladaha daran ee qolka falcelinta MOCVD.
Hoosudhaca Balaadhinta Kulaylka (4.5 x 10-⁶K-¹): Habkan MOCVD Graphite Heater wuxuu si wax ku ool ah u yareeyaa dahaadhka dillaaca ama diirinta isbeddellada heerkulka awgeed, iyada oo hubinaysa sharafta qaabdhismeedka baaskiilka kuleylka muddada-dheer.
3. Waxqabadka maamulka kulaylka oo la hagaajiyay
Heerkulka Sare ee Heerkulka (200-300 W / mK): Kuleyliyaha kuleylka sare ee Graphite MOCVD Heater wuxuu go'aamiyaa in alaabtu si dhakhso ah oo isku mid ah u wareejin karto kulaylka si loo gaaro qaybinta heerkulka dusha sare ee wafer joogto ah (± 1 ° C), si wax ku ool ah u wanaajiso isku-duubnaanta lakabka epitaxial.
Naqshadaynta Goobta Qulqulka Gaaska Laminar: Ka dib markii tignoolajiyada joogtada ah iyo cusboonaysiinta, MOCVD Heater-ka simannaanta dusha sare (Ra ≤ 0.8μm) iyo hagaajinta joomatari waxay hubisaa qaybinta isku midka ah ee gaaska falcelinta waxayna yaraynaysaa qaab-la'aanta dhigaalka ee ay keento qalalaasaha.
sooc
Isbarbardhigga Hababka Farsamada iyo Faa'iidooyinka
| Calaamadaha | Semixlab SiC kuleyliyeyaasha dahaarka leh | Kuleyliyeyaasha garaafka caadiga ah |
| Heerkulka shaqada ee ugu badan (aan lahayn) | 3000 ° C | 2500 ° C |
| Nadiifinta kiimikada | ≥99.99995% | ≤99.99 |
| Qabsashada kuleylka | 300W/mK | 120-150 W/mK |
| Adhesion ku dhegsan | 415 MPa (4-dhibcood foorarsi) | 100-200 Xildhibaan |
| Nolosha caadiga ah (wareegyo) | > 500 wareegyada | 100-200 wareegyada |
Advantage tartanka
Waa maxay sababta Semixlab?
Habaynta: Semixlab waxaa ka go'an in ay siiso macaamiisheena alaabada iyo adeegyada farsamada. Waxaan taageernaa habeynta cabbirrada aan caadiga ahayn (ilaa dhexroorka 360mm) iyo dhumucda dahaarka (20-500μm) si loo daboolo baahiyo qalab oo ballaaran.
Shahaadada Caalamiga ah: Kuleyliyahayaga 'SIC Coated Graphite Heater' waa u hoggaansanaan SEMI, ISO 9001 waa shahaado, iyo alaabadayada waxaa inta badan loo dhoofiyaa Yurub iyo Mareykanka, iyo sidoo kale Japan iyo South Korea, oo leh qiimo weyn / faa'iido waxqabad.
Isku-dhafka Farsamada: Semixlab wuxuu muddo dheer sii waday wadashaqeyn dhow oo lala yeesho hay'adaha cilmi-baarista ee ugu sarreeya Shiinaha, iyadoo la adeegsanayo tignoolajiyada daahan patented (sida habka CGT Kaarboon ee SiC³) si kor loogu qaado cufnaanta dahaarka iyo iska caabinta shoogga kulaylka.
