Ⅰ Waa maxay susceptor graphite?

Susceptor graphite waa qayb muhiim ah oo loo isticmaalo habab warshadeed heerkul sare ah, looguna talagalay in lagu nuugo tamarta korantada (tusaale, inta jeer ee raadiyaha ama shucaaca microwave) oo u beddelo kulayl. Waxay u shaqeysaa sidii walxaha kuleyliyaha ama kulaylka, abuurista jawi heer kul ah oo la kontoroolo, walxaha la warshadeeyay.

Features Muhiimka ah:

Qalab: Ka samaysan garaafka saafiga ah ee sarreeya ama garaafka lagu dahaadhay alaabta dib u soo celinta (tusaale, SiC, TaC).

Shaqada: Si wax ku ool ah waxay tamarta ugu beddeshaa kulayl iyadoo iska caabinaysa shoogga kulaylka iyo daxalka kiimikada.

Naqshad: Caadi ahaan loo qaabeeyey sidii taarikada, saxanadaha, ama joomatariyada gaarka ah si loo buuxiyo shuruudaha qalabka gaarka ah.

Ⅱ Maxaa loo isticmaalaa susceptors graphite?

Susceptors Semixlab graphite waa lama huraan marka la eego semiconductor sare iyo wax soo saarka. Waa kuwan codsiyadooda ugu waaweyn:

1. Kobaca Epitaxial (EPI)

Silicon Epitaxy:

Susceptors graphite ayaa ugu horrayn loo isticmaalaa kaydinta uumiga kiimikaad (CVD) reactors si ay ugu koraan lakabyo silikoon hal-crystalline ah oo ku yaal maraqa silikoon. Dareenku wuxuu xaqiijiyaa kuleyl isku mid ah, taasoo awood u siineysa kontoroolka saxda ah ee dhumucda lakabka iyo doping.

Gallium Nitride (GAN) Epitaxy:

Muhiim u ah soo saarista aaladaha ku saleysan GaN (tusaale, LED-yada, korontada). Dabaysha garaafka waxay u adkaystaan ​​heerkulka sare (>1,000°C) looga baahan yahay kobaca GaN ee nidaamyada MOCVD

2. MOCVD (CVD Organic Birta)

Gudaha GaN, GaAs, ama InP-ga qalabka wax-soo-saarka, graphite-ku waxay bixiyaan kuleyl xasiloon si ay u qurmiyaan hor-u-yaalayaasha organic-ga ah ee birta iyo ku shubista aflaanta khafiifka ah ee substrates.

3. Habaynta kulaylka degdega ah (RTP)

Waxaa loo istcimaalaa soo saarista, oksaydhaynta, ama tillaabooyinka firfircoonida dopant. Awoodaha kulaylinta/qaboojinta degdega ah ee qofka shakiga leh waxay yaraynaysaa miisaaniyada kulaylka, taas oo muhiim u ah CMOS horumarsan iyo soosaarida qalabka xusuusta.

4. Codsiyada kale

Kobaca SiC Crystal: Shakiyeyaasha garaafyada saafiga ah ee sarreeya ayaa loo isticmaalaa foornooyinka sublimation-ka ee koritaanka Ingot SiC.

Dheeman Synthesis: Waxay bixisaa jawiga heerkulka sare ee looga baahan yahay wax soo saarka dheemanka CVD.

III. Farqiga Waxqabadka ee u dhexeeya Noocyada Susceptor Graphite

Susceptors graphite waxaa lagu hagaajiyay dahaar kor u qaadaya waxqabadkooda meelo gaar ah. Waa kan isbarbardhigga:

Codsiyada Goobta

Garaafka nadiifka sare leh:

Si loogu isticmaalo gaaska aan shaqaynayn (tusaale, Si epitaxy, dheeman-samaynta).

Ikhtiyaarka qiimaha jaban ee hababka aan lahayn gaasaska daxalka ah.

Garaafyada SiC-dahaarka leh:

Loogu talagalay MOCVD ee GaAs ama wax soo saarka LED (iska caabbinta balaasmaha etching iyo HCl byproducts).

RTP ee deegaanka oksijiinta ka kooban.

Garaafyada TaC-dahaarka leh:

GaN MOCVD: adkaysi u leh horudhacyada ku salaysan Cl₂ iyo heerkulka sare.

SiC epitaxy: adkaysi u leh Si uumiga daxalka inta lagu jiro koritaanka sublimation.

Ⅳ Waa maxay sababta dahaarka dusha sare uu muhiim u yahay?

Dahaarka SiC: wuxuu ku daraa xannibaad ka hortag ah oksaydhka iyo weerarka kiimikaad, kordhinta nolosha nuglaanta ee jawiga gaaska falcelinta.

Daahan TaC: waxay siisaa xasillooni heersare ah oo ku jirta deegaan qani ku ah halogen (caado u ah geeddi-socodka GaN iyo SiC), ka hortagga daxalka garaafka iyo wasakheynta.