EN 
EN
DA
NL
FI
FR
DE
IT
JA
KO
NO
PL
PT
RO
RU
ES
SV
TL
ID
SK
UK
VI
TH
TR
FA
BE
LA
UZ
Silicon Carbide Sic dhoobada dhoobada ah
Silicon Carbide (SiC) Disc Ceramic Porous oo ka socda Semixlab waxaa loogu talagalay codsiyada habaynta semiconductor wafer wax qabad sare leh oo u baahan saxnaanta, nadiifnimada, iyo adkeysiga. Iyada oo la xakameeyey porosity-yar-yar, kulayl-kuleyl sare, iyo firfircoonitaan kiimikaad, qaybtani waxay door muhiim ah ka ciyaartaa vacuum chucking, CMP (Chemical Mechanical Polishing), epitaxy, iyo hababka maaraynta waferka.
Description
Ku habboon: aaladaha CMP, reactors MOCVD epitaxy, modules wareejinta wafer, nidaamyada nadiifinta balaasmaha, iyo isu imaatinka substrate ESC.
Ⅰ Halabuurka Maaddada iyo Astaamaha Jirka
Qaab dhismeedka dhoobada SiC oo nadiif ah oo sarreeya
Waxaa laga sameeyay ≥99.9% ultra-pure α-SiC ama β-SiC budada, saxan kasta oo daloola waxaa lagu soosaaraa habraac sax ah oo si sax ah loo xakameeyay iyo habsocod dhexgal ah. Natiijadu waa shabakad dalool lebis ah oo hubiya socodka gaaska deggan iyo daacadnimada farsamada ee hoos yimaadda jawiga habaysan.
Tilmaamaha Farsamada ee Muhiimka ah:
| Property | faahfaahinta |
| Waxyaabaha | α-SiC / β-SiC |
| xagiisayna | ≥99.9% |
| Xadgudubka | 10-40% (la hagaajin karo) |
| Cabirka daloolka | 0.1-10 μm |
| Dhaqdhaqaaqa kulaylka | 120–200 W/m·K |
| Heer kulka ugu Sareeya | 1600-1800 ° C |
| darantahay ingeega, | Mohs 9.3 |
| Resistance Chemical | Ku fiican HF, HCl, Cl₂, H₂ |
| mugga | 2.8-3.1 g/cm³ |
Tilmaamaha Waxqabadka:
● Permeability Uniform Vacuum: Qaybinta daloolada saxda ah waxay hubisaa socodka gaaska dheellitiran ee dusha sare ee waferka.
● Deganaanshiyo kulayleed oo heer sare ah: Waxay ilaalisaa daacadnimada farsamada hoosteeda baaskiil wadida heerkul sare.
● Jiilka Walxaha Hoose: Sagxadaha SiC ee la nadiifiyey waxay yareeyaan khatarta faddaraynta.
● Joogteynta Sare: Nolosha adeegga oo la dheereeyay xitaa marka lagu jiro jawiga kiimikada iyo balaasmaha gardarrada ah.
Ⅱ Caqabadaha Habka Guud iyo xalalka Semixlab
| Challenge | Sababta xididka | Semixlab Solutions |
| Nuugista Vacuum aan sinnayn | Cabbirka daloolka aan lebiska ahayn ama xidhmidda | Qaybinta cabbirka daloolka la xakameeyey iyo nadiifinta balaasmaha ee xilliyeed |
| Wasakhowga Qaybaha | Dildilaaca yaryar ee ka yimaada baaskiilka kulaylka | Codso daahan CVD SiC si loo xoojiyo dusha sare |
| Labbis La'aanta kulaylka | Cufnaanta aan sinnayn ama wasakhowga | Isticmaal SiC (> 150 W/m`K) iyo sagxadaha la safeeyey |
| Nabaad guurka Kiimikada | Soo-gaadhista dheer ee HF ama gaasaska ku salaysan Cl | Qabo CVD cufan SiC sintering hybrid si kor loogu qaado iska caabinta daxalka |
| Awoodda Makaanikada oo la dhimay waqti ka dib | Wafer soo noqnoqda oo culeyska rarista | Galitaanka dugsiga sare si loo hagaajiyo adkaanta jabka oo loo kordhiyo nolosha adeegga |
Semixlab kontoroolka walxaha iska leh iyo injineernimada dusha sare waxay xaqiijiyaan waxqabadka joogtada ah, isku halaynta muddada dheer, iyo hoos u dhaca qalabka ee wareegyada nidaamka badan. Ku soo dhawoow inaad nagala tashato latalinta farsamada dheeraadka ah iyo adeegyada habaynta alaabta.
Codsiyada
Codsiyada habsocodka Semiconductor
1. Wafer Vacuum Chucking and Handling
Saxanadaha SiC-da daloola ayaa si weyn loogu isticmaalaa sidii taarikada vacuum chuck ama taageerooyinka qaade ee rarida iyo hababka wareejinta. Xuubkooda sida saxda ah loo farsameeyay waxay hubisaa nuugista faakuumka isku midka ah, baabi'inta beddelka wafer iyo hagaajinta saxnaanta toosan.
2. Polishing makaanik kiimikada (CMP)
Inta lagu jiro CMP, saxanka dabada leh ee SiC wuxuu u adeegaa sida side ama saxan gadaal ka riixaya, oo awood u siinaya:
● Xataa qaybinta slurry
● Taageerada waferka oo deggan
● Qorshaha iyo xakamaynta cilladaha oo la hagaajiyay
Marka la barbar dhigo aluminiumka caadiga ah ama quartz, SiC waxay bixisaa qallafsanaan sare iyo kulaylka kuleylka, hubinta cimri dheer iyo joogteynta habka hagaajinta.
3. Habaynta Heerkulka Sare
Gudaha MOCVD iyo LPE reactors epitaxial, saxanka dabada leh ee SiC wuxuu u shaqeeyaa sidii saldhig suulaha kulaylka ama madal taageero, isagoo hubinaya:
● Kulaylka isku midka ah ee ku wareejinta maraqa
● Dhumucda lakabka epitaxial oo deggan
● Iska caabbinta sare ee gaaska hab-socodka falcelinta
4. Nidaamyada Nadiifinta Qoyan & Plasma
Thanks to adkeysigeeda daxalka kiimikaad iyo balaasmaha, saxanka daloola ee SiC wuxuu si wax ku ool ah u qabtaa sida saxan faafinta gaaska ama substrate sifaynta kiimikaad ee kuraasta qoyan iyo qolalka nadiifinta.
5. ESC (Electrostatic Chuck) Lakabka Saldhigga
Marxaladda waferka ee horumarsan, ceramics-ka SiC-da daloola waxa ay u shaqeeyaan sidii saldhigyo kulaylka ESC-yada, isku darka wareejinta kulaylka wanaagsan iyo dahaarka korantada ee xakamaynta heerkulka waferka saxda ah.
Adeegyada aan bixino
Dukaanka wax soo saarka Semixlab
