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Waferada PZT piezoelectric-ga khafiifka ah
Wafer-yada khafiifka ah ee filimka khafiifka ah ee Semixlab ee PZT Piezoelectric waxay u adeegaan sidii agabka ugu muhiimsan ee shaqada aaladaha MEMS ee heerka sare ah. Annagoo ka faa'iideysanayna hababka PVD ee horumarsan (Physical Upor Deposition), waxaan gaarnay dhigista filimka khafiifka ah ee PZT ee polycrystalline ee substrates-ka caadiga ah ee 6-inch iyo 8-inch, oo lagu garto joogteynta piezoelectric ee aadka u sareysa iyo isku-midnimada sare. Iyada oo la adeegsanayo fidsanaan baaxadda atomiga ah iyo xakamaynta jihada saxda ah ee kiristaalka, alaabtayadu waxay si weyn u xoojisaa hufnaanta beddelka elektaroonigga ah iyadoo la hubinayo isku-dheellitirka heerka wax soo saarka iyo wax-soo-saarka sare. Waxay si fiican ugu habboon yihiin codsiyada MEMS ee casriga ah - oo ay ku jiraan qalabka wax-soo-saarka acoustic, micropumps-ka saxda ah, iyo isgaarsiinta RF - iyagoo awood siinaya macaamiisheenna inay si siman u xiraan farqiga u dhexeeya R&D shaybaarka ilaa wax-soo-saarka ballaaran ee baaxadda leh.
Description
Stack-ga Caadiga ah
Loogu talagalay sameynta MEMS-ka caadiga ah, waxaanu bixinaa qaab-dhismeedyo heer sare ah oo si heer sare ah loo xaqiijiyay kuwaas oo hubiya is-dhexgal aan kala go 'lahayn oo leh khadadka wax-soo-saarka semiconductor-ka.
| lakabka | Shaqada Muhiimka ah | Tilmaamo Farsamo |
| Elektrode-ka ugu Sarreeya | Gudbinta Isgaadhsiinta | Kondhom sare iyo xasillooni hab-raac oo aad u fiican iyadoo la isticmaalayo biraha sharafta leh. |
| Lakabka Piezoelectric | Beddelka Tamarta | Filim khafiif ah oo PZT ah oo cufnaan sare leh, oo si xooggan (100) u janjeedha oo leh awood wadis sare leh. |
| Lakabka Buffer | Jihaynta Crystalline | Tamarta is-dhexgalka ee la hagaajiyay; waxay xakameysaa faafitaanka walxaha; waxay xoojisaa iska caabbinta daalka ferroelectric. |
| Elektrode-ka Hoose | Saldhigga Kalsoonida Sare leh | Elektrode bir ah oo heer sare ah oo hubinaya xasilloonida korontada muddada dheer. |
| Lakabka dhejiska | Xidhiidhka & Isku xirka | Waxay xoojisaa isku-dhejinta farsamada ee u dhaxaysa elektroodka iyo substrate-ka. |
| Substrate (Si/SOI) | Taageerada Dhismaha | Si buuxda ula jaanqaadi kara aaladaha Silicon (Si) ama SOI ee caadiga ah ee 8-inji ah. |
Adeegyada Habaynta & Macdanta
Xalalka loogu talagalay Codsiyada Piezoelectric ee Waxqabadka Sare leh
Adeegyada aan bixino
● Filimada Khafiifka ah ee Gaarka ah: Noocyada filimada gaarka ah iyo hagaajinta dhumucda saxda ah.
● Macdanta OEM: Kobaca tayo sare leh ee ku yimid buskudka ay macaamiishu keenaan.
● Isdhexgalka SOI: Dhigaal gaar ah oo loogu talagalay RF/MEMS horumarsan.
sooc
| dhimaya | faahfaahinta |
| Cabirka Wafer | 6-inji / 8-inji |
| Iska caabinta Sare ee Si | > 5,000 Ω`cm |
| Dhumucda iyo Dhumucda | La beddeli karo naqshad kasta |
| Lakabka Sanduuqa | Taageerada dhumucda kala duwan |
Codsiyada
Wafer-keena PZT piezoelectric ee 8-inji ah waxaa loo sameeyay si loo daboolo baahiyaha saxda ah ee warshadaha kala duwan, iyagoo u adeegaya asaaska beddelka elektaroonigga ah ee hufan:
● Cusboonaysiinta Codka iyo Isgaarsiinta: Ku habboon Piezoelectric Micromachined Ultrasonic Transducers (pMUT) iyo Acoustic MEMS (tusaale ahaan, sameecadaha waxqabadka sare leh iyo makarafoonada). Iyada oo leh xasaasiyad sare iyo isku dheelitirnaan marxaladeed, wafers-keennu waxay awood u siinayaan maqal cad iyo sawir-qaadis ultrasonic sax ah. Intaa waxaa dheer, astaamaha Q-factor-ka sare waxay si fiican ugu habboon yihiin shaandheeyayaasha RF MEMS ee habaynta calaamadaha 5G/6G.
● Fluidics-ka Sax ah & Nano-Actuation: Madaxyada daabacaadda Inkjet iyo xakamaynta dareeraha saxda ah, isku-dhafka sare ee piezoelectric-ga ayaa hubiya xasilloonida soo noqnoqoshada sare iyo isku-dheellitirka mugga hoos u dhaca. Micropump-yada Caafimaadka/Bilicda iyo Atomization-ka, iska caabbinta daalka ee aadka u fiican waxay dammaanad qaadaysaa xakamaynta socodka saxda ah inta lagu jiro hawlgalka muddada dheer.
● Isku halaynta Warshadaha & Caafimaadka: Laga bilaabo qabashada dhaqdhaqaaqa yar-yar ilaa nebulization-ka ultrasonic-ka ee tamarta sare leh, xalalkayaga PZT waxay bixiyaan wax soo saar koronto oo deggan, iyagoo ka caawinaya macaamiisha inay ka gudbaan caqabadaha cabbirka iyo hufnaanta ee darawallada elektaroonigga dhaqameed.
Advantage tartanka
Waxtarka Beddelka Elektromekaanikada ee Heer Sare ah
Iyada oo ku saleysan tignoolajiyada xakamaynta jiheynta qaab-dhismeedka ee horumarsan, filimka khafiifka ah wuxuu leeyahay isku-darka piezoelectric ee aadka u sarreeya e31,f. Maadaama uu yahay isha ugu muhiimsan ee dhaqaajiyayaasha MEMS, waxay suurtogal ka dhigaysaa wax soo saarka isbeddelka soo noqnoqda ee soo noqnoqda, ee barokaca weyn marka danab wadista aad u hooseeya la sameeyo.
Midaynta Habka Heerka Wax Soo Saarka Badan
Tiknoolajiyada xakamaynta sameynta filimka heerka atomiga waxay hubineysaa isku midnimada dhumucda filimada khafiifka ah ee 8-inji ah waxay gaaraan heerarka halbeegga warshadaha. Qalafsanaanta dusha sare ee nanometer-ka ayaa si fiican u buuxisa shuruudaha habaynta ee qaab-dhismeedka acoustic iyo indhaha ee saxda ah.
Tayada adag iyo kalsoonida
Cufnaanta cilladaha aadka u hooseeya iyo xakamaynta walxaha sare waxay si weyn u hagaajiyaan wax soo saarka qaabaynta ee soo socda ee micro-nano-ka. Qaab-dhismeedka kaydka lakabka badan ee la hagaajiyay iyo naqshadeynta lakabka kaydka ee gaarka ah ayaa si wax ku ool ah u xakameynaya daalka ferroelectric, taasoo hubinaysa xasilloonida muddada dheer ee aaladaha xaaladaha hawlgalka ee adag.
