Shaashada Quartz ee MOCVD

Qalabka Kaydinta Uumiga Kiimikada Dabiiciga ah ee Birta (MOCVD), shaashadda quartz ayaa door muhiim ah ka ciyaarta hagaajinta hababka korriinka filimada khafiifka ah. Waxay lagama maarmaan u yihiin kor u qaadista isku-midnimada, ilaalinta nadaafadda, iyo hagaajinta waxtarka dayactirka qalabka. Hoos waxaa ku yaal dulmar faahfaahsan oo ku saabsan codsiyadooda gaarka ah iyo faa'iidooyinka.

Ⅰ Hawlaha Muhiimka ah ee Shaashada Quartz ee MOCVD

Shaashado Quartz ah ayaa aasaas u ah in la gaaro kontorool sax ah iyo natiijooyin tayo sare leh oo ku jira reactors MOCVD:

1. Xeerka socodka gaaska

Shaashadda Quartz waxay jir ahaan u qaybisaa gobollada kala duwan ee qolka falcelinta. Kala soocida saxda ah waxay hagtaa dariiqa qulqulka gaaska falcelinta (sida ilaha birta-organic iyo hydrides), si weyn u yaraynaysa qaska. Natiijadu waa qaybinta gaas isku mid ah oo ka badan dusha sare ee substrate, kaas oo wanaajinaya dhumucda iyo isku-duubnaanta lakabyada epitaxial sida GaN iyo GaAs.

2. Go'doon wasakhaysan

Shaashadahani waxay u dhaqmaan sidii caqabad, ka hortagaya fal-celinta fal-celinta ka-soo-baxa (tusaale, qaybo, dhigaal aan kacsanayn) inay dib ugu soo dhacaan substrate-ka ama qaybaha muhiimka ah sida madaxyada qubayska. Kiimiko la'aanta sare ee quartz waxay hubisaa in shaashadda lafteedu aysan noqon isha wasakhaysan, ilaalinta tayada filimka.

3. Maareynta heerkulka

U shaqaynta sidii xannibaadda kulaylka, shaashadaha quartz waxay yareeyaan kulaylka u dhexeeya aagga falcelinta iyo qaybaha durugsan. Tani waxay gacan ka geysaneysaa in la joogteeyo heerkulka heerkulka deggan, kaas oo si gaar ah muhiim ugu ah kobaca heer-kulka-xasaasiga ah ee isku-dhafka ah sida InP iyo AlN.

Ⅱ Kala duwanaanshaha Naqshadeynta waxaa taageeray Semixlab

Semixlab waxa ay bixisaa noocyo kala duwan oo naqshadaynta shaashadda quartz si ay u buuxiso shuruudaha nidaamka MOCVD ee kala duwan:

1. Shaashado daloolsan

Shaashado leh dhexroor godad gaar ah ayaa la heli karaa si ay isu ekaysiiyaan socodka gaaska, taas oo ka dhigaysa mid ku habboon hababka heerka socodka sare ee u baahan isku midnimo gaar ah.

2. Shaashado wareeg ah

Xakamaynta horumarsan, shaashadaha la wareejin karo waxay u oggolaanayaan hagaajinta firfircoon ee qaybinta socodka gaaska. Habkani waxa uu si gaar ah faa'iido u leeyahay in la wanaajiyo isku-duubnida waferrada aagga weyn, sida 6-inch ama 8-inch substrates.

3. Shaashado Dahaarsan

Si kor loogu qaado awoodaha ka-hortagga dhigista oo loo kordhiyo cimriga shaqada, waxaan ku siinnaa shaashado quartz ah oo leh dahaaryo dusha sare ah sida SiC ama Al₂O₃. Dahaarkani waxay bixiyaan iska caabin heer sare ah oo ku saabsan samaynta walxaha aan loo baahnayn.

Shaashado Quartz waa qaybo muhiim ah oo ka mid ah qalabka MOCVD, dheelitirka waxqabadka iyo kharashka. Naqshadoodu waa inay la mid tahay shuruudaha qaab dhismeedka qolka falcelinta, dhaqdhaqaaqa gaaska, iyo nidaamyada walxaha gaarka ah. Sida hormuudka iibiyaha Shiinaha ee Quartz Screens ee MOCVD, Semixlab waxaa ka go'an inuu bixiyo alaab la habeeyey iyo xalal farsamo. Waxaan si daacad ah u rajeyneynaa inaan kula shaqeyno iskaashi dheeri ah.

Dhacdooyinka Codsiga Muhiimka ah

Shaashado Quartz ah ayaa si istiraatiji ah loo shaqeeyaa inta lagu guda jiro nidaamka MOCVD si kor loogu qaado dhinacyada kala duwan ee waxqabadka:

1. Ilaalinta Substrate

Wax soo saarka dufcaddii, shaashaduhu waxay muhiim u yihiin ka hortagga wasakhowga u dhexeeya substrate-yada ku xiga, taasoo ka dhigaysa inay si gaar ah ugu habboon yihiin nidaamyada MOCVD-wafer-badan.

2. Ilaalinta madaxa qubeyska

Marka la dhigo madaxa qubeyska hoostiisa, shaashadaha quartz waxay yareeyaan falcelinta tooska ah ee godadka madaxa qubeyska. Tani waxay si weyn u kordhisaa wareegyada nadiifinta waxayna ugu dambeyntii hoos u dhigtaa kharashka dayactirka.

3. Kahortagga falcelinta kahor

Meelaynta saxda ah ee shaashadaha quartz waxay u ogolaaneysaa dib u dhigista isku darka ilaha birta-organic iyo hydrides. Tani waxay ka hortagtaa falcelinta gaaska-wejiga hore ee aan loo baahnayn taasoo keeni karta samaynta qayb, sida falcelinta degdega ah ee u dhaxaysa TMGa iyo NH₃ inta lagu jiro korriinka GaN.

Faa'iidooyinka alaabta Quartz

Doorashada quartz synthetic (SiO₂) ee shaashadahaan waxaa dhaqaajinaya sifooyinkeeda gaarka ah ee ku habboon jawiga adag ee MOCVD:

1. Nadiif Sarreysa & Iska caabinta Daxalka

Quartz-keena synthetic wuxuu leeyahay nadiif ka badan 99.99%. Aad bay ugu adkaysanaysaa hababka nadiifinta caadiga ah ee ku lug leh asiidhka xooggan sida HF iyo HCl, iyo muhiimad ahaan, kama falceliso gaasaska hab-socodka sida H₂ iyo NH₃.

2. Xasiloonida kulaylka

Iyada oo leh barta jilicsan ee qiyaastii 1700 ° C iyo isugeynta fidinta kulaylka hoose ee 5.5 × 10⁻⁷/°C, shaashadaha quartz waxay ilaalinayaan hufnaantooda qaabdhismeed oo kuma dhisna heerkul ku shaqeeya MOCVD caadiga ah (800-1200°C).

3. Hufnaanta indhaha

Daahfurnaanta quartz waxay u oggolaaneysaa pyrometer-yada infrared si ay si sax ah ula socdaan heerkulka substrate iyada oo loo marayo shaashadda. Tani waxay awood u siinaysaa xakamaynta habka-waqtiga dhabta ah iyo maaraynta heerkulka saxda ah.