All Categories
Dahaarka Kaarboonka Dhalada ah

Dahaarka Kaarboonka Dhalada ah

Hoyga> Alaabta > Daboolka CVD > Dahaarka Kaarboonka Dhalada ah

Substrate garaafyada kaarboonka leh ee dahaarka leh
Substrate garaafyada kaarboonka leh ee dahaarka leh

Semixlab Glassy kaarboon-dahaarka garaafyada


Iyo meesha Asal ahaan: Shiinaha
Magaca Brand: Semixlab
Number Model: Kaarboon dhalo-01
Certification: ISO9001
Order Tirada Yar ee: Ku xiran gorgortanka
Price: Xidhiidhka Xigasho Gaar ah
Details Baako: Xidhmada dhoofinta caadiga ah
Waqtiga dirida: Waqtiga Bixinta: 15-30 Maalmood Kadib Xaqiijinta Dalabka
Shuruudaha Payment: T / T
Supply Kartida: 10 oo tan/Bishii
Description

Substrate kaarboonka dahaarka leh ee garaafiga ah waa walxo isku dhafan oo leh graphite sida maaddada aasaasiga ah, la dahaadhay ama lagu dahaadhay kaarboon dhalo leh, kaas oo isku dara dhaqdhaqaaqa wanaagsan iyo iska caabinta heerkulka sare ee graphite oo leh kiimikaad sare ee tamarta, cufnaanta iyo astaamaha dusha siman ee kaarboon dhalo leh.

Si loo daboolo baahiyaha isbeddelaya ee warshadaha, waxaan soo saarnay faylal kala duwan oo badeecado ah oo si buuxda u qalabaysan si loo buuxiyo shuruudaha teknoolojiyadda daahan jiilka soo socda, iyadoo la hubinayo inaan bixin karno xalal la jaan qaada horumarkii ugu dambeeyay ee garoonka semiconductor.

Codsiga:

Marka loo eego goobaha codsiga, kala duwanaanta codsiga ee garaafiga kaarboonka leh ee dahaarka leh waa mid aad u ballaaran. Dhinaca qalabka semiconductor, sababtoo ah iska caabin heerkul sare oo heer sare ah, caabbinta oksaydhka iyo korantada, waxay noqotay wax ku habboon soo saarista guddiyada wareegga isku dhafan ee waxqabadka sare leh iyo aaladaha elektiroonigga ah. Dhinaca alaabta shubista joogtada ah, garaafiga kaarboonka leh ee dahaarka leh ayaa si weyn loogu isticmaalaa dahaarka kristalizer ee mashiinnada shubka joogtada ah sababtoo ah dufanka wanaagsan iyo iska caabinta heerkulka sare, si wax ku ool ah u wanaajinaya waxtarka shubista joogtada ah iyo tayada wax-soo-saarka. Intaa waxaa dheer, dhinacyada hawada, warshadaha nukliyeerka, birta, warshadaha kiimikada, iwm, garaafiga kaarboonka leh ee daboolan ayaa sidoo kale ka ciyaara door aan la bedeli karin.

Adeegyada la bixin karo:

Falanqaynta xaaladda codsiga macaamiisha, agabka u dhigma, xallinta dhibaatada farsamada.

Astaanta shirkadda:

Semixlab waxay leedahay 2 shaybaar, koox khubaro ah oo leh 20 sano oo waayo-aragnimo agab ah, oo leh R&D iyo awoodaha wax soo saarka, tijaabinta iyo xaqiijinta.

Faahfaahin Gaar ah:

a. Codsiga ugu muhiimsan: Substrates garaafyada dahaarka leh ee kaarboonku waxay leeyihiin codsiyo ballaaran oo dhinacyo kala duwan ah sida semiconductors, tamarta, tignoolajiyada dahaarka gaarka ah iyo tignoolajiyada soo baxaya sababtoo ah sifooyinka gaarka ah ee jirka iyo kiimikada. Horumarka joogtada ah ee tignoolajiyada, baaxadda codsigeeda iyo muhiimada ayaa la filayaa inay sii balaarto.

b. Habka diyaarinta:

Habka dahaarka:

Substrate-ka garaafiga waxa lagu dhex milmay kaarboonaysable polymer precursor iyo dahaar lebis ah ayaa lagu sameeyay daahan lafdhabarta, daahan buufinta ama kaydinta uumiga kiimikada (CVD).

Kaarboonization heerkul sarreeya:

Daawaynta heerkul sare (1000-3000 ° C) ee jawiga aan firfircoonayn (sida argon) waxay u beddeshaa polymerka kaarboon dhalo leh, kaas oo si adag ugu xidhan substrate-ka garaafka.

c. Halbeegyada qeexitaanka asaasiga ah:

dhumucda dahaarka (la doortay iyadoo loo eegayo deegaanka daxalka, oo dhumucdiisuna si mug leh 50-100μm); cufnaanta garaafka substrate (cufnaanta sare waxay u adkaysataa dhexgalka); jawiga isticmaalka (oxidizing/aan shaqayn); Heerka kulaylka ≤10 ℃/daqiiqo (yaraynta cadaadiska interface); Isticmaalka heerkulka hawada ≤600 ℃ (gaaska aan shaqaynayn ayaa loo baahan yahay haddii ay ka badan tahay)

sooc

Isbarbardhigga waxqabadka muhiimka ah

dhimaya Substrate garaafyada kaarboonka leh ee dahaarka leh Garaafka saafiga ah Kaarboon dhalo saafi ah
Heerkulka heerkulka ugu sarreeya 2800 ℃ inert jawi, 600 ℃ hawada 3000 ℃ inert jawi, 600 ℃ hawada 3000 ℃ inert jawi, 500 ℃ hawada
Cadaadiska shoogga Heer sare ah (graphite substrate wuxuu ilaaliyaa diiqada kulaylka) aad u fiican Poor
Iska caabbinta daxalka HF Aad u fiican ( ilaalinta dahaarka) Poor aad u fiican
Kakanaanta habaynta Dhexdhexaad (waxay u baahan tahay habka daahan) Si fudud loo farsameeyo Way adagtahay in la habeeyo (aad u jajaban)
Qiimaha Dhexdhexaad (≈2-3 jeer ka badan garaafka saafiga ah) Low Sare
Codsiyada

Goobaha codsiga ee ugu muhiimsan

Jihada codsiga Xaalad caadi ah qiimaha xal
Soosaarka Semiconductor Daawaynta kulaylka wafer Ka ilaali graphite inuu sii daayo wasakhda iyo wasakhaynta weelasha silikoon
Kaarboonka dhalooyinka leh Habka Bridgman ama Czochralski, waxa loo isticmaalaa in lagu beero hal kiristaalo oo ah GaAs iyo SiC Kaarboonka dhalooyinka leh waxay u adkeysan karaan heerkul sare oo ka sarreeya 2000 ° C waxayna leeyihiin iska caabin shoog kulayl oo heer sare ah.
Qaybaha fal-celinta epitaxial heerkulka sare Sida kuwa u nugul substrate-ka ama sida liner ee qolalka falcelinta Marka la korayo lakabyada GaN iyo SiC epitaxial, kimikal la'aanta kaarboonka dhalooyinka ayaa ka hortagi karta falcelinta horudhacayaasha.
Plasma Etching Environment Electrode ama giraanta diirada ee qolka falcelinta etching U adkaysta nabaad guurka balaasmaha iyo sii daynta walxaha hoose
Codsiyada hal-abuurka leh ee Sawir-qaadista EUV iyo e-beam sawir qaade Isku-dhafka fidinta kulaylku wuxuu ku dhow yahay eber, taas oo ka fiican muraayadda quartz-dhaqameedka. Dareenka korantada ayaa si dabiici ah u baabi'in kara kharashka korontadu
Qabashada birta dhalaalaysa Aluminium electrolytic cell cathode daahan U adkaysta daxalka aluminium ee dhalaalay, kordhinta nolosha adeegga
Electrochemical electrode Taarikada laba-cirifoodka unugga shidaalka Lakabka kaarboon dhalo ee ilaalinta daxalka iyo graphite substrate ee korantada
Foornada faakuumka heerkulka sare Lakabka ilaalinta walxaha kuleylka Iska yaree isbedbeddelka garaafka heerkulka sare
Qalabka falanqaynta Qaybaha isha spectrometer mass Nadaafadda sare waxay yaraynaysaa dhawaaqa asalka

Taageerada xaqiijinta silsiladda deegaanka

Gudbiyay xaqiijinta isku halaynta ee soosaarayaasha sida Sinosteel
Shirkadda iyo FangDa.

Habka wax soo saarka caadiga ah

Dooro substrate (qalabka graphite leh porosity of 10% -15%) → Nadiifinta dusha sare (1000-2000 rpm / min, 30-60min) iyo preheating (150-200 ℃, 1-2h) 500-1000mpa·s 2500 ℃)

Iyada oo loo marayo hal-abuurnimo tignoolajiyadeed oo joogto ah iyo horumarin wax soo saar ah, Substrate-ka dhalooyinka leh ee kaarboonka dahaarka leh ee Semixlab waxa uu horumar ka gaadhay agabka garaafyada gudaha, isaga oo buuxinaya baahida sii kordheysa ee garaafiga kaarboonka dahaarka leh ee garaafyada gees-goynta sida baabuurta tamarta cusub, nidaamyada kaydinta tamarta, iyo agabka semiconductor. Haddii aad u baahan tahay inaad hesho waraaqo cadcad oo tifaftiran oo faahfaahsan ama aad diyaarsato tijaabada muunad, fadlan la xidhiidh kooxdayada taageerada farsamada.

Advantage tartanka

Semixlab Glassy kaarboon dahaarka leh garaafyada substrate faa'iidooyinka muhiimka ah

Cilmiga kiimikada:

U adkaysta asiidh adag, alkalis xoog leh, iyo biraha dhalaalay (sida Al iyo Cu).

Nadiifnimada dusha sare:

Nadiifin sare (waxyaabaha dambaska ka kooban <0.01%).

Antioxidant:

Heerkulka iska caabinta oksaydhaynta dusha sare ayaa kordhay ilaa 500-600 ℃.

Awoodda makaanikada:

Kordhi adkaanta dusha sare (yaraynta xidhashada).

Qiimaha:

30-50% ka hooseeya alaabta kaarboonka dhalooyinka saafiga ah.

Adeegyada aan bixino

Dukaanka wax soo saarka Semixlab

WEYDIISASHADA

Qaybaha kulul