Daboolka Satellite Graphite ee SiC ee loogu talagalay MOCVD

Daboolka dayax-gacmeedka ee dahaarka leh ee SiC waa qayb muhiim ah oo ku jira nidaamyada MOCVD (Metal-Organic Chemical Vapor Deposition), gaar ahaan loogu talagalay in lagu hubiyo xasilloonida, adkeysiga, iyo nadaafadda inta lagu jiro koritaanka epitaxial ee GaN, SiC, GaAs, iyo agabyada kale ee semiconductor. Waxaa lagu dhisay saldhigga garaafiga isostatic oo lagu dahaadhay CVD SiC oo nadiif ah, waxay isku daraysaa guryaha kulaylka wanaagsan leh iska caabbinta kiimikaad sare, oo buuxinaysa shuruudaha adag ee wax soo saarka semiconductor-ka soo socda.

Qalabka & Astaamaha Jirka

Substrate graphite: Garaafyada isostatic ee hadhuudh-ku-fiican, oo siinaya xoog farsamo oo sarreeya iyo mashiinnada.

Daboolka CVD SiC: Lakabka carbide silikoon ee CVD, hubinta engegnaanta gaarka ah, iska caabinta daxalka, iyo ka hortagga curinta walxaha. Iyo sifada wareejinta kulaylka heersare ah ee heerkulbeegyada isku midka ah ee loo qaybiyo nidaamka susceptor MOCVD. Nolosha adeeg dheer ee baaskiil wadida heerkulka sare ee soo noqnoqda (>1200°C).

Codsiyada ku jira MOCVD

Daboolka dayax-gacmeedka garaafiga ah ee dahaarka leh ee SiC waa qayb muhiim ah oo ka mid ah reactors MOCVD, oo loogu talagalay in lagu hubiyo maaraynta wafer ee deggan, xakamaynta heerkulka saxda ah, iyo habaynta wasakhda la'aanta. Codsiyadeedu waxay ku fidsan yihiin wax soo saarka semiconductor oo kala duwan, oo ay ku jiraan GaN, GaAs, InP, SiC, iyo agabyada kale ee III-V.

1. Soo dejinta Wafer & Taageerada

Daboolka dayax-gacmeedku wuxuu u adeegaa sidii qaab-dhismeedka qaab dhismeedka wafers inta lagu jiro habka koritaanka epitaxial. Saldhigga garaafka wuxuu bixiyaa xasillooni farsamo oo heer sare ah, halka dahaarka SiC uu ka hortagayo nabaad-guurka wuxuuna hubinayaa meelaynta wafer-ka. Isku dhafkan wuxuu yareynayaa halista silbashada wafer ama dildilaaca yar ee hoos yimaada hawlgalka heerkulka sare.

2. Wareegga lebis ee Xataa Dhigista

MOCVD gudaheeda, waferrada waxa lagu wareejay xawaare la kontaroolay si loo gaadho qaybinta gaaska horudhaca ah ee isku midka ah. Daboolka dayax-gacmeedku wuxuu hubinayaa wareeggu siman oo xasilloon, yaraynta gariirka iyo ilaalinta dhumucda lakabka epitaxial lebbiska ee dusha sare ee wafer - arrin muhiim u ah LED-soo-saarka sare leh, qalabka korontada, iyo soosaarka qalabka RF.

3. Maamulka kulaylka & Wareejinta kulaylka

Labbiska heerkulka ayaa lagama maarmaan u ah tayada crystal. Heerarka kulaylka sare ee daahan SiC waxay xaqiijisaa wareejinta kulaylka wax ku oolka ah ee ka soo jiidashada ilaa waferka, hoos u dhigista kulaylka. Tani waxay keenaysaa sifooyinka lakabka joogtada ah sida feejignaanta doping, jihaynta crystal, iyo walbahaarka filimka.

4. Ka-hortagga Gaaska Geedi socodka ah

Nidaamyada MOCVD waxay ku lug leeyihiin gaasas dagaal leh sida NH₃ (ammonia), H₂ (hydrogen), iyo horudhacyada birta-organic. Lakabka SiC wuxuu u shaqeeyaa sidii caqabad adag oo ka soo horjeeda weerarka kiimikada, ka hortagga nabaad guurka garaafka, abuurista walxaha, iyo wasakheynta qolka kicinta.

5. Yaraynta Wasakhowga Walxaha

Wasakhaynta walxaha waxay si toos ah u saamaysaa waxqabadka iyo wax-soo-saarka aaladda. Dahaarka SiC wuxuu bixiyaa siman, cufan, iyo dusha adag oo iska caabiyay jajabinta iyo samaynta boodhka, hubinta filimada epitaxial ee nadiifka ah iyo kalsoonida qalabka sare.

6. Nolosha Adeega Dheeraadka ah ee Baaskiilka Heerkulka Sare

Inta lagu jiro wareegyada kululaynta iyo qaboojinta soo noqnoqda, garaafka aan dahaarka lahayn ayaa si dhakhso ah u hoos u dhacaya. Dahaarka SiC wuxuu si weyn u wanaajiyaa iska caabbinta oksaydhka iyo cimri dhererka farsamada, si ay u kordhiso muddada adeegga, yaraynta wakhtiga dhimista, iyo hoos u dhigista guud ahaan qiimaha lahaanshaha ee shaybaadhka iyo R&D.

Faa'iidooyinka Semixlab

Semixlab waxaa ka go'an inuu keeno garaafyada waxqabadka sare leh iyo xalalka dahaarka leh ee SiC ee qalabka epitaxy-ga ee semiconductor. Awoodeena waxaa ka mid ah:

● Habaynta - Naqshado loo habeeyey oo ku habboon noocyada kala duwan ee reactor MOCVD iyo shuruudaha macaamiisha.

● La-talinta Farsamada - In ka badan 20 sano oo khibrad wax soo saar semiconductor ah si ay u taageeraan hagaajinta habka.

● Xakamaynta tayada adag - Dabool kasta oo dayax-gacmeedku wuxuu maraa hubinta saxnaanta cabbirka, xaqiijinta dhumucda dahaarka, iyo tijaabooyinka xasiloonida heerkulka sare.

● Adeegga Iibka Ka Dib Lagu kalsoonaan karo - Kooxda taageerada u heellan waxay hubisaa jawaab-celin degdeg ah iyo hagitaan joogto ah oo macaamiisha ah.

Daboolka dayax-gacmeedka garaafiga ee SiC dahaarka leh ee Semixlab waxaa loo habeeyay si uu u bixiyo degganaansho heerkul sare ah, iska caabin daxalka, iyo nadaafadda hababka MOCVD. Iyadoo la hubinayo tayada dusha sare ee wafer iyo kordhinta qalabka wakhtiga, waxay bixisaa kharash-ku-ool ah oo xal la isku halleyn karo oo loogu talagalay epitaxy-ka isku-dhafka ah. La xidhiidh Semixlab maanta si aad u habayso qaybahaaga garaafyada dahaarka leh ee SiC oo aad kor ugu qaaddo waxqabadkaaga wax soo saarka MOCVD.