Saxanka Taageerada Lugaha ee TaC ee Dahaarka leh

Taarikada Taageerada Lugaha ee Dahaaran ee TaC waxay u adeegtaa qayb muhiim ah oo qaab-dhismeed ah oo ku jirta fal-galayaasha epitaxial-ka semiconductor-ka heerkulka sare leh. Waxaa loogu talagalay inay bixiso taageero farsamo oo deggan oo loogu talagalay isku-dhafka substrate-ka iyo saldhigga iyadoo la ilaalinayo xasilloonida kiimikada iyo kulaylka ee gaarka ah xaaladaha geedi socodka ee aadka u daran.

Qaybtani waxay isticmaashaa substrate graphite saafi ah oo sarreeya oo ay weheliso dahaarka cufan ee CVD tantalum carbide (TaC). Qaab-dhismeedkan isku-dhafan wuxuu ka faa'iidaystaa mashiinada sare ee graphite iyo gudbinta kulaylka oo ay weheliso iska caabbinta heerkulka sare ee TaC iyo xasilloonida kiimikada ee gaarka ah.

Taarikada taageerada substrate-ka ee Semixlab TaC-da ku dahaaran ayaa si weyn loogu isticmaalaa qalabka wax soo saarka semiconductor-ka ee horumarsan, oo ay ku jiraan nidaamyada epitaxial-ka SiC, falgalayaasha GaN MOCVD, iyo falgalayaasha CVD heerkulka sare leh. Nidaamyadan gudahood, xasilloonida qaab-dhismeedka, iska caabbinta daxalka, iyo xakamaynta wasakhowga ayaa muhiim u ah ilaalinta wax soo saarka wafer-ka ee joogtada ah.

Doorka ku jira Fal-celiyeyaasha Epitaxial-ka ee Semiconductor-ka

Qalabka epitaxial-ka semiconductor-ka dhexdiisa, qalabka taageerada ayaa sita substrate-ka iyo wafer-ka inta lagu jiro hababka koritaanka heerkulka sare. Saxanka taageerada wuxuu u adeegaa qayb muhiim ah oo qaab-dhismeed ah oo ku jirta shirkan.

Shaqadeeda ugu weyni waa inay bixiso taageero farsamo oo deggan oo loogu talagalay qaab-dhismeedka substrate-ka, iyadoo hubinaysa meelaynta saxda ah ee qaybaha muhiimka ah ee fal-galayaasha inta lagu jiro hawlgalka.

Maadaama hababka epitaxial-ka ay caadi ahaan ku shaqeeyaan heerkul ka badan 1000°C ilaa 1600°C, xitaa qaab-dhismeedka yar ama qaab-dhismeed la'aanta ayaa si xun u saameyn kara:

● Isku mid ahaanshaha heerkulka fal-galka

● Qaybinta socodka gaaska

● Joogtaynta koritaanka lakabka epitaxial

Iyada oo la ilaalinayo xasilloonida farsamada ee qaab-dhismeedka substrate-ka, TaC Coated Pedestal Support Plate waxay ka caawisaa ilaalinta xasilloonida kulaylka iyo joomatari inta lagu jiro jawiga falcelinta - muhiim u ah gaaritaanka korriin isku mid ah oo epitaxial ah oo ku baahsan wafer-ka.

Codsiyada caadiga ah

Taarikada taageerada saldhigga ee dahaarka leh ee Semixlab TaC ayaa si weyn loogu isticmaalaa qalabka wax soo saarka semiconductor-ka ee horumarsan, oo ay ku jiraan:

● Falaadhaha epitaxial-ka ee SiC ee wax soo saarka semiconductor-ka korontada

● Nidaamyada GaN iyo LED MOCVD

● CVD-ga heerkulka sare leh iyo fal-galayaasha koritaanka epitaxial-ka

● Nidaamyada kaydinta semiconductor-ka ee horumarsan

Faa'iidooyinka Codsiyada Epitaxy Heerkulka Sare

Xasillooni Heerkul Sare oo Heer Sare ah oo Heerkul Sare leh: TaC waxay leedahay dhibic dhalaalid aad u sareysa (qiyaastii 3880°C), taasoo ka dhigaysa mid ku habboon xaaladaha kulul ee adag ee ku jira falgalayaasha epitaxial. Dahaarka wuxuu ilaaliyaa hufnaanta qaab-dhismeedka iyo xasilloonida dusha sare inta lagu jiro hawlgalka heerkulka sare ee dheer.

Iska caabinta Daxalka Sare: Geedi socodka koritaanka epitaxial badanaa waxay ku lug leeyihiin gaasaska falgalka ah sida hydrogen, ammonia, iyo isku-dhafka ka kooban chlorine. Dahaarka TaC wuxuu muujiyaa iska caabin aad u weyn oo ku wajahan deegaannada kiimikada, taasoo ka hortagaysa burburka substrate-ka garaafitka.

Wasakhowga Walxaha oo La Yareeyay: Soo saarista walxaha waa arrin muhiim ah oo ku saabsan wax soo saarka semiconductor-ka. Dahaarka TaC ee cufan, oo isku mid ah ayaa yareeya nabaad-guurka dusha sare iyo soo-baxa, isagoo gacan ka geysanaya ilaalinta jawi fal-gale aad u nadiif ah iyo ilaalinta tayada wafer-ka.

Muddada Cimriga Qaybaha La Kordhiyey: Iyada oo ka ilaalinaysa substrate-ka graphite daxalka heerkulka sare iyo xirashada farsamada, dahaarka TaC wuxuu si weyn u dheereeyaa cimriga adeegga ee taarikada taageerada substrate-ka. Tani waxay yareysaa soo noqnoqoshada dayactirka ee xarumaha wax soo saarka semiconductor-ka waxayna kor u qaadaysaa waqtiga guud ee qalabka.