TaC Dahaarka Garaafka Susceptor ee Kobaca Epitaxial LED

TaC (Tantalum Carbide) Dahaarka Graphite Susceptor ee ay soo saartay Semixlab ayaa si gaar ah loogu farsameeyay heerkul sare oo heerkul sare ah oo LED ah hababka koritaanka epitaxial sida GaN iyo AlGaN MOCVD. Marka la isku daro substrate graphite-ka saafiga ah oo cufan leh oo CVD-ku kaydsan TaC daahan, dulleeyahaani wuxuu hubinayaa lebis kuleyl gaar ah, xasilooni kiimikaad, iyo xakamaynta wasakhda - oo muhiim u ah helitaanka tayada crystal sare iyo waxqabadka LED joogto ah.

Halabuurka Maaddada iyo Astaamaha Muhiimka ah

Qalabka Aasaasiga ah: Nadiifi-sare oo istatic Graphite, kulaylka kuleyl aad u wanaagsan, cufnaanta hoose, iyo mashiinada saxda ah.

Lakabka Dahaarka: TaC (Tantalum Carbide) iyada oo loo sii marayo Habka CVD, oogada aadka u cufan, qallafsanaanta sare, iyo firfircoonaanta kiimikada ee hawada NH₃/H₂.

Codsiyada caadiga ah ee kobaca Epitaxial LED

Habka kobaca epitaxial LED, gaar ahaan semiconductors-ku-saleysan GaN, TaC Coated Graphite Susceptor waxay u adeegtaa sidii kuleyl muhiim ah iyo isku xirka kiimikaad ee u dhexeeya nidaamka kuleylka MOCVD iyo waferrada la beeray. Qalabkeeda gaarka ah iyo hufnaanta qaabdhismeedka ayaa awood u siinaya inay qabato doorar badan oo muhiim ah inta lagu jiro wareegga epitaxy LED - laga bilaabo nucleation ilaa kobaca lakabka buuxa.

1. Kululaynta iyo Heerkulka midaysan

Inta lagu guda jiro Epitaxy MOCVD, dammaanad qaaduhu wuxuu u shaqeeyaa sida qaybta wareejinta kulaylka aasaasiga ah, hubinta in dusha sare ee wafertu ay ilaalinayso labbiska iyo heerkulka saxda ah ee la kantaroolay (sida caadiga ah inta u dhaxaysa 1000-1200 ° C ee koritaanka GaN).

● Heerarka kulaylka sare ee substrate-ka garaafyada ayaa u oggolaanaya qaybinta kulaylka degdega ah oo isku mid ah.

● Daahanka TaC, oo leh qiiqiisa xasilloon iyo xasilloonida kulaylka aadka u wanaagsan, waxay hubisaa in kulaylkan uu si siman u iftiimay dhammaan maraqyada, hoos u dhigista heerkulka heerkulka kaas oo haddii kale sababi kara dhumucda lakabka labbis la'aan, foorarsiga wafer-kadeed ee walaaca, ama jiilka cilladda.

● Dib-u-kicinta wafer-ka badan, lebiskani waa muhiim si loo gaaro dhumucda filimka GaN iyo AlGaN joogto ah iyo ka kooban dhammaan maraqyada.

2. Kahortagga Wasakhda Kaarboonka

Mid ka mid ah welwelka aasaasiga ah ee kobaca epitaxial LED waa wasakhowga kaarboon ee ka yimid qaybaha garaafka qaawan ee heerkulka sare ee hoos yimaada hawada hydrogen iyo ammonia.

Dahaarka CVD TaC wuxuu u shaqeeyaa sidii xannibaad cufan oo fidsan, oo gebi ahaanba ka soocaysa substrate-ka garaafyada jawiga habka.

Tani waxay ka hortagtaa hoos u dhigista kaarboonka ama soo saarista kaarboonka, taas oo haddii kale u horseedi karta ku darida kaarboonka aan loo baahnayn ee shabagga GaN - hufnaanta hufnaanta iftiinka, dhaqdhaqaaqa sidaha, iyo isku halaynta aaladda LED-ka.

● Iyadoo la ilaalinayo jawi korriin nadiif ah, taC-ku dahaaran susceptor waxay awood u siinaysaa lakabyada epitaxial-nadiifinta sare leh oo leh tayada crystal aad u wanaagsan iyo cufnaanta cilladda.

3. Xasiloonida Hanaanka La Wanaajiyey iyo Ku-noqoshada

Wax-soo-saarka epitaxial LED wuxuu u baahan yahay ku-noqosho sax ah oo habraacyo badan ah.

● dusha sare ee TaC-ku dahaadhay waxay ilaalisaa sii dayn joogto ah iyo milicsi, kuwaas oo ah halbeegyada muhiimka ah ee xakamaynta heerkulka pyrometric MOCVD.

● Tani waxay keenaysaa akhrin heerkul ah oo la isku halayn karo, hoos u dhigista jaangooyooyinka, iyo hagaajinta nidaamka dufcad-ilaa-barka xasiloonida.

● Sidaa awgeed, soosaarayaashu waxay ka faa'iideystaan ​​wax-soosaar sare oo wafer ah, hoos u dhac ku yimid, iyo nolosha nuglaanta oo dheer marka la barbar dhigo kuwa aan dahaaran ama daboolay SiC ee deegaan heerkul sare ah.

4. Waafaqsanaanta Platforms Reactor LED ee kala duwan

Susceptors-ka Semixlab ee TaC-da dahaaran ee Graphite waxay la jaan qaadayaan nidaamyada waaweyn ee MOCVD sida:

● AIXTRON meerayaasha meeraha

● Veeco K465i, EPIK 700/868

● Taiyo Nippon Sanso SR2000/SR4000

● Dab-dejiyayaal badan oo wafer ah ama hal mar

Dhibane kasta waxa lagu habeeyay joomatari reactor-ka macmiilka, isaga oo hubinaya isku toosinta wafer-ka ugu fiican, dhaqdhaqaaqa socodka gaaska, iyo summaynta goobta heerkulka ee hababka gaarka ah ee epitaxial LED.

Faa'iidooyinka Semixlab

1. Injineeriyada Qalabka Sare

Semixlab waxay shaqaaleysiisaa tignoolajiyada dahaarka CVD TaC si sax ah loo xakameeyey si loo gaaro dhumuc wanaagsan, dhejis, iyo cufnaan - hubinta waxqabadka xannibaadaha iyo xasilloonida kulaylka.

2. Wax soo saar gaar ah

Dhibane kasta waxa loo qaabayn karaa si waafaqsan qaabka reactor, cabbirka waferka, ama shuruudaha habraac gaar ah (midnimada heerkulka, sii daynta, dhumucda dahaarka, iwm.).

3. La-tashi Farsamo & Taageero

Injineerada habka epitaxy ee guriga dhexdiisa ah waxay bixiyaan la-tashi farsamo oo hal-hal ah, ka caawinta macaamiisha xulashada agabka, hab-raaca habraaca, iyo hagaajinta waxqabadka kulaylka.

4. Xakamaynta tayada adag

Dhibane kastaa waxa uu maraa kormeer dhawr-tallaabo ah - oo ay ku jiraan lebbiska dhumucda, tijaabinta xabagta, falanqaynta dusha SEM, iyo ansixinta baaskiil wadida kulaylka - hubinta tayada iyo isku halaynta joogtada ah.