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Foosto Garaafeedka Sare ee SiC Dahaarka leh ee SiC Epitaxy
Foostada Garaafiga Sare ee SiC Dahaarka leh ee SiC Epitaxy waa qayb muhiim ah oo ka mid ah geeddi-socodka koritaanka epitaxial ee waferrada silikoon carbide (SiC). Waxaa soo saaray Semixlab, foostadan waxay isku daraysaa garaafyada istatic-ka ee nadiifka sare leh iyo daahan CVD SiC cufan, taasoo bixisa degenaansho heerkuleed oo heersare ah, iska caabin daxalka, iyo isku-duubnaanta dusha sare - oo lagama maarmaan u ah hubinta tayada sare ee crystalline ee lakabyada SiC epitaxial. Adigoo rajaynaya wada tashigaaga dheeraad ah.
Description
Tilmaamaha Qalabka iyo Waxqabadka
Garaafyada xudunta u ah waxaa laga soo saaraa kaarboon isostatic ultra-fine, oo bixisa porosity hooseeya iyo daacadnimo farsamo oo heerkul sare hooseysa.
Daahanka SiC waxa lagu kaydiyaa Kaydinta Uumiga Kiimikada (CVD), oo samaynaysa lakab difaac cufan, labis ah, oo si adag ugu xidhan sifooyinkan soo socda:
● Nadiif Sarreysa & Dhaqdhaqaaq Kiimiko: Waxay ka hortagtaa wasakhda inta lagu jiro koritaanka epitaxial SiC, hubinta qolka falcelinta nadiifka ah oo deggan.
Xasiloonida kulaylka Sare: Waxay u adkaysataa heerkulka ka sarreeya 1600°C waxayna ilaalisaa saxnaanta cabbirka.
● Daxalka Fiican iyo Iska caabinta Nabaadguurka: Waxay ka ilaalisaa gaasaska fal-celiska ah sida H₂ iyo SiH₄ sida badan loo isticmaalo SiC epitaxy.
● Ku dheggan xooggan iyo jilicsanaanta dusha sare: Waxay dammaanad qaadaysaa abuuritaanka walxaha ugu yar iyo wareega wareega ee xasilloon inta lagu jiro kaydinta epitaxial.
Caqabadaha & xalalka Semixlab
| Challenge | Sababta | Semixlab Solution |
| Diirka dahaarka ama deminta | Isku-dheelitir la'aanta fidinta kulaylka ee u dhexeeya graphite iyo lakabka SiC | Ka faa'iidaysiga geeddi-socodka CVD gradient iyo prereatment dusha saxda ah si kor loogu qaado adhesion |
| Wasakhowga dusha sare | Wasakhda gaaska ama dahaarka cilladaha yaryar | Qaadashada agabka isha nadiifka ah ee SiC iyo nadiifinta dahaarka ka dib |
| Qallooca kulaylka hoostiisa kululaynta soo noqnoqda | Qaybinta kulaylka aan sinnayn ama daalka graphite | Joomatari foostada la hagaajiyay iyo isticmaalka garaafyada isotropic si loo hagaajiyo xoogga farsamada |
| Cimrigii nolosha oo hoos u dhacay deegaanka daxalka | H₂ ama SiH₄ gaaska nabaad guurka | Codsiga lakabka ilaalinta dhumucsan ee SiC (≥100 µm) oo leh qaab dhismeed crystal cufan |
Foostada Garaafka Sare ee Semixlab ee Sic-dahaarka leh waxay ku siisaa ilaalin la isku halayn karo iyo xasilloonida geeddi-socodka sic epitaxy, kobcinta tayada waferka iyo waxqabadka reactor. Naqshadeynta heerkulka-sare, nadiifinta sare, iyo hawlgalka muddada-dheer, waxay u taagan tahay qayb muhiim ah oo soo saarista tamarta jiilka soo socota. Gaadhi la-tashi farsamo ama taageero qaabayn la habeeyey.
Codsiyada
Codsiyada ku jira SiC Epitaxy
Foostada Garaafiga Sare ee Dahaarka leh ee SiC waxaa lagu rakibay gobolka sare ee reactors SiC epitaxy (tusaale, AIXTRON, LPE, ama nidaamyada Veeco) oo waxay door muhiim ah ka ciyaartaa xakamaynta qaybinta goobta kulaylka iyo isku midka ahaanshaha socodka gaaska. Shaqadeeda ugu muhiimsan waxaa ka mid ah:
● Ilaalinta dheelitirka kulaylka ee u dhexeeya aagagga reactor ee sare iyo hoose si loo hubiyo in dhumucda lakabka epitaxial la mid ah.
● Ka-hortagga isdhexgalka tooska ah ee kiimikaad ee u dhexeeya garaafyada iyo gaaska geeddi-socodka, si loo kordhiyo cimriga qaybaha.
● Kor u qaadida nadaafadda reactor, yaraynta wasakhowga walxaha inta lagu jiro orodyada badan ee epitaxial.
Iyada oo loo marayo nakhshad la wanaajiyey iyo makiinadda saxda ah, foosto Semixlab waxay gacan ka geysataa tayada waferka joogtada ah, heerka wax-soosaarka oo la wanaajiyey, iyo hoos u dhaca dayactirka ee nidaamyada epitaxy SiC.
Adeegyada aan bixino
Dukaanka wax soo saarka Semixlab
